Used CyberOptics Metrology Wafers

Wafer Based Sensors – WaferSense

When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on the CyberOptics Wafersense measurement devices for chamber gapping, leveling, wafer handoff teaching (camera wafer), vibration, airborne particle sensor and humidity measurement. These wafers are vacuum compatible, wireless and provide data in real-time.

Semiconductor fabs and OEMs value the accuracy, precision and versatility of the WaferSense metrology wafers to enable improvements in fab yields and reduce wafer processing equipment downtime.

All WaferSense products listed below have been lightly used/refurbished and re-calibrated by CyberOptics.  Please complete the form below for more information or a quote.

  • Used Auto Leveling Sensor (ALS) Wafer
    Improve equipment setup time
    Enhance process uniformity with objective and reproducible level adjustments
    Reduce equipment maintenance time with wireless measurement
    Reduce particles and increase yield with improved equipment set-up
    Wafer-shaped: Available in 200mm and 300mm wafer sizes
    Highly accurate: Measures horizontal leveling
    Wireless: Transmits data wirelessly to your laptop or PC in real-time
    Data logging: Records raw data in CSV format for analysis
  • Used Auto Vibration Sensor (AVS) Wafer
    Speed equipment qualification with wireless vibration measurements
    Shorten equipment maintenance cycles with a wafer-like accelerometer
    Lower equipment expenses with objective and reproducible data
    Optimize equipment productivity and yield by maximizing acceleration and minimizing vibration
    Wafer-shaped: Available in 200mm and 300mm wafer sizes
    Highly accurate: Measures acceleration in three directions. x, y and z. with a range of +/-2G, resolution of +/-0.01G and frequency response 0 to 200 Hz, -3dB
    Wireless: Transmits data to your laptop or PC in real-time (CSV raw data also available)
    Easy-to-use software: CyberSpectrum software provides the user with real-time visual feedback and can record and replay logged data for review and analysis
  • Used CyberOptics Auto Teach Wafer or Camera Wafer
    Used Auto Teach System (ATS) Camera Wafer
    Accurate wafer handoff calibration improves yield and lowers particulate contamination.
    WaferSense ATS wafer moves through your semiconductor equipment just as a wafer to capture offset data for accurate
    calibration of transfer positions.
    Wireless communications and wafer form factors reduce equipment downtime from hours to minutes.
    Wireless and vacuum compatible, the ATS teaching wafer makes calibration safe for both technicians and
    process stations.
    Visual inspection speeds up troubleshooting and lowers consumable expenses.
    ATS displays real-time images to technicians as robots move ATS through the tool.
  • Used Auto Gapping System (AGS) Wafer
    Improve uniformity and yield with wireless gap measurement wafer
    Achieve chamber matching and parallelism in a very short time

    Measures gaps at three points or five points to allow you to achieve the ideal leveling and platen/showerhead parallelism for your CVD equipment Objective and reproducible gap adjustments result in better tool-to-tool process uniformity
    Take the human variable out of adjusting your equipment with objective (numerical) measurements. Numerical and graphical
    displays make adjustments fast and simple.

    CyberSpectrum software, the graphical user interface provided with AGS, displays numerical and graphical measurements in either
    millimeters or inches from inside the process chamber under a vacuum, letting you see the effect of your adjustments in real-time.
    Wireless technology eliminates broken wires and vacuum leaks.

  • Used Airborne Particle Sensor (APS) Wafer
    Detect particles in real-time without opening the tool, so you don’t need to expose process areas to the environment. The APS wafer is used for rapid tool partitioning and segmentation.

    Reports particles in 0.14μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
    Available in 150mm, 200mm, and 300mm wafer sizes.
    Transmits particle data to your laptop or PC in real-time.
    CyberSpectrum application software provides the user with real-time visual feedback and can record and replay logged data for review and analysis.
    Raw data also saved in CSV format for analysis.

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